The highly reflectance semiconductor layers are predestinated for spectral reflectance spectrometer. Precise measurements of thickness distribution on wafers can be automatically obtained in very short time. For microscopic small features specialized spectrometer with mapping capabilities or Cmount Adapter for standard systems can be offered.

Typical coatings:

Failure analysis

Oxide, Nitride

SiO2, Si3N4, AlN


Multiple layer


Microscopic features

In-situ measurements