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SCUTEC GmbH
Philipp-Reis-Str.4
63150 Heusenstamm
The highly reflectance semiconductor layers are predestinated for spectral reflectance spectrometer. Precise measurements of thickness distribution on wafers can be automatically obtained in very short time. For microscopic small features specialized spectrometer with mapping capabilities or Cmount Adapter for standard systems can be offered.
Typical coatings:
Failure analysis
Oxide, Nitride
SiO2, Si3N4, AlN
Photoresist
Multiple layer
HR-Mirror
Microscopic features
In-situ measurements